Cap structure of a raw material bottle

ABSTRACT

A cap structure of a raw material bottle is provided with a pneumatic joint, a raw material output joint, and a raw material reflux joint, such that by linking the pneumatic joint with an inert gas supplying source, and by linking the raw material output joint and the raw material reflux joint with a pump, a chemical raw material can be pushed to a production and processing facility by the pump or the inert gas. When a raw material supply system has reached to a configuration state that stops supplying the raw material, the chemical raw material can be transmitted back to the raw material bottle through the raw material reflux joint, thereby recycling in real time the chemical raw material into the raw material bottle.

BACKGROUND OF THE INVENTION

(a) Field of the Invention

The present invention relates to a cap structure of a raw materialbottle, and more particularly to a cap structure which enables the rawmaterial to be refluxed for use in real time.

(b) Description of the Prior Art

In a process of making a semi-conductor integrated circuit or a TFT-LCD(Thin-Film Transistor Liquid-Crystal Display), construction of a relatedcircuit will be mostly proceeded through procedures of exposure anddeveloping, as well as etching, wherein a photoresist is a primary rawmaterial for the exposure and developing, with a primary principle thata photoresist (photoresistant composition), which is composed of apolymer resin, a light sensitive compound and a solvent, is uniformlycovered or coated on a layer of insulator or a conductive metal layer ona wafer or a glass substrate.

After the wafer or glass substrate which has been covered or coated bythe photoresist is heated and baked to vaporize the solvent, it isselectively exposed to some kind of radiation, such as an ultravioletray, an electron or X-ray. The exposed wafer or glass substrate is bakedagain, and an expected pattern will be resulted after developing thebaked wafer or glass substrate. The developed wafer or glass substrateis then etched to remove the layer of insulator or conductive metallayer, and to remove the residual photoresist for accomplishing transferof the miniature pattern onto a surface of the wafer or glass substrate.

In order to satisfy a requirement of automatic operation for coatingwith the photoresist by a production and processing facility, as shownin FIG. 1, a conventional photoresist transmission loop includesprimarily a first pipe 61 and a second pipe 62 which are located at araw material bottle 10 for containing the photoresist (or other chemicalraw material for removing air bubbles in the photoresist). The firstpipe 61 is linked with an inert gas (such as nitrogen) supplying source,whereas the second pipe 62 is linked with a storage device 20, a pump30, and a production and processing facility 40.

In a pre-processing operation that the chemical raw material starts tobe supplied, the chemical raw material in the raw material bottle 10 ispushed into the second pipe 62 by the inert gas, and under actions ofthe storage device 20 and a vent line 21, air inside the second pipe 62is vented. When the second pipe 62 is completely filled with thephotoresist, the photoresist will be pushed to the production andprocessing facility 40 under an action of the pump 30 or the inert gas,wherein the pump 30 is configured to automatically discharge a certainamount of photoresist at a specified time or some processing step,according to a requirement of practical processing operation.

Moreover, to enable the raw material bottle 10 to be in a closed shapefor facilitating the inert gas to push the chemical raw material intothe first pipe 61, as shown in FIG. 2, the conventional raw materialbottle 10 is provided, at its cap 11, with a pneumatic joint 111 forconnecting with the first pipe 61, and a raw material output joint 112for connecting with the second pipe 62. Other than these two joints,there is no other structure for feeding in the chemical raw material.Therefore, the discharged photoresist is directly drained to a wasteliquid tank 50 to be processed as the waste, only through a dischargeopening at a front end of the pump 30, which will cause a waste of thephotoresist, and increase cost for processing the waste liquid.

SUMMARY OF THE INVENTION

Accordingly, the primary object of present invention is to provide a capstructure of a raw material bottle, wherein the entire cap structureincludes principally a pneumatic joint, a raw material output joint, anda raw material reflux joint. In addition, the raw material output jointis provided with a suction pile which is extended into the raw materialbottle that is linked with an inert gas supplying source through thepneumatic joint, and is connected to a storage device, a pump, and aproduction and processing facility, through the raw material outputjoint.

The cap of raw material bottle is provided additionally with the rawmaterial reflux joint, such that the cap can be linked to a dischargeopening of the pump through the raw material reflux joint. Under anormal operation, chemical raw material is pushed to the production andprocessing facility through the pump or the inert gas. When a rawmaterial supply system has reached to a configuration state that stopssupplying the chemical raw material, the chemical raw material will betransmitted back to the raw material bottle through the pump in realtime to be recycled in real time, thereby achieving objects of reducingcost of the chemical raw material and cost of waste recycling, as wellas mitigating jeopardy to environment.

To enable a further understanding of the said objectives and thetechnological methods of the invention herein, the brief description ofthe drawings below is followed by the detailed description of thepreferred embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic view of a conventional loop for supplying achemical raw material.

FIG. 2 shows a perspective view of a conventional cap of a raw materialbottle.

FIG. 3 shows a perspective view of a cap of the present invention.

FIG. 4 shows a schematic view of a loop for supplying a chemical rawmaterial, according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is to improve a cap structure of a raw materialbottle in a chemical raw material supply system, to facilitate theentire raw material supply system to recycle in real time the chemicalraw material which was to be discharged directly as waste liquid,thereby achieving objects of reducing cost of the chemical raw materialand cost of waste recycling, and mitigating jeopardy to environment.

Referring to FIG. 3 and FIG. 4 an entire chemical raw material supplysystem comprises basically a first pipe 61 and a second pipe 62, at araw material bottle 10 for containing the chemical raw material. The rawmaterial bottle 10 is linked with an inert gas (such as nitrogen)supplying source by the first pipe 61, and is linked with a storagedevice 20, a pump 30, and a production and processing facility 40, bythe second pipe 62.

A cap 11 of the raw material bottle 10 is provided with a pneumaticjoint 111 for connecting with the first pipe 61, a raw material outputjoint 112 for connecting with the second pipe 62, and a raw materialreflux joint 113 for connecting with a third pipe 63 through which theraw material bottle 10 can be linked to a discharge opening of the pump30. Upon implementing, the pneumatic joint 111, the raw material outputjoint 112, and the raw material reflux joint 113 are high pressure pipejoints, so as to be sustained with working pressure that is exerted tothe raw material bottle 10 by the raw material supply system. Inaddition, the raw material output joint 112 is provided with a suctionpipe which is extended to a bottom of the raw material bottle 10.

Accordingly, in a pre-processing operation that the chemical rawmaterial starts to be supplied, the chemical raw material in the rawmaterial bottle 10 is pushed into the second pipe 62 by the inert gas,and under actions of the storage device 20 and a vent line 21, airinside the second pipe 62 is vented. When the second pipe 62 iscompletely filled with the chemical raw material, the chemical rawmaterial will be pushed to the production and processing facility 40under an action of the pump 30 or the inert gas.

In particular, when the pump 30 automatically discharges the chemicalraw material, at a specified time or some processing step, to remove airbubbles inside the chemical raw material, the chemical raw material canbe transmitted back in real time to the raw material bottle 10 by thepump 30 through the third pipe 63 and the raw material reflux joint 113,for recycling in real time, thereby achieving objects of reducing costof the chemical raw material and cost of waste recycling, as well asmitigating jeopardy to environment.

Upon practically implementing, the raw material reflux joint 113 can befurther provided with a valve (not shown in the drawings) which can be amanual valve for allowing a user to control a time for transmitting backthe chemical raw material, or an electric valve which controls the timefor transmitting back the chemical raw material by a related controlcircuit. In addition, the valve may not be installed at all, but byconfiguring a time difference between activating the pump and the inertgas to achieve an object of controlling the time for transmitting backthe chemical raw material.

It is of course to be understood that the embodiments described hereinis merely illustrative of the principles of the invention and that awide variety of modifications thereto may be effected by persons skilledin the art without departing from the spirit and scope of the inventionas set forth in the following claims.

1. A cap structure of a raw material bottle being installed at anopening of a raw material bottle for enabling the raw material to be ina closed shape, wherein the cap is provided with a pneumatic joint, araw material output joint, and a raw material reflux joint.
 2. The capstructure of a raw material bottle according to claim 1, wherein the rawmaterial output joint is provided with a suction pipe which is extendedinto the raw material bottle.
 3. The cap structure of a raw materialbottle according to claim 1, wherein the pneumatic joint is a highpressure pipe joint.
 4. The cap structure of a raw material bottleaccording to claim 1, wherein the raw material output joint is a highpressure pipe joint.
 5. The cap structure of a raw material bottleaccording to claim 1, wherein the raw material reflux joint is a highpressure pipe joint.
 6. The cap structure of a raw material bottleaccording to claim 1, wherein the raw material reflux joint is providedwith a valve.
 7. The cap structure of a raw material bottle according toclaim 6, wherein the valve is a manual valve.
 8. The cap structure of araw material bottle according to claim 6, wherein the valve is anelectric valve.